Abstract
Detection of low Z recoils (C, N, O) from scattering of high energy alpha particles (10-15 MeV) is compared with conventional ERDA with heavy ion projectiles. Recoils and scattered a particles are separated using pulse shape discrimination or coincidence methods. Submonolayer sensitivity and depth resolution in the nm range is obtained. Depth/mass ambiguity may be avoided.
| Original language | English |
|---|---|
| Pages (from-to) | 532-535 |
| Number of pages | 4 |
| Journal | Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms |
| Volume | 79 |
| Issue number | 1-4 |
| DOIs | |
| Publication status | Published - 2 Jun 1993 |
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