Efficient deeply etched InP/InGaAsP phase shifters with low dark current

L. Xu; X.J.M. Leijtens; T. Vries, de; Y.S. Oei; P.J. Veldhoven, van; R. Nötzel; M.K. Smit

Efficient deeply etched InP/InGaAsP phase shifters with low dark current

L. Xu, X.J.M. Leijtens, T. Vries, de, Y.S. Oei, P.J. Veldhoven, van, R. Nötzel, M.K. Smit

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Original language	English
Title of host publication	Proceedings of the 12th Annual Symposium of the IEEE/LEOS Benelux Chapter, 17-18 December 2007, Brussels, Belgium
Editors	M. Delqué, Ph. Emplit, S.P. Gorza, P. Kockaert, X.J.M. Leijtens
Place of Publication	Brussels
Publisher	IEEE/LEOS
Pages	115-118
ISBN (Print)	978-2-9600753-0-4
Publication status	Published - 2007
Event	12th Annual Symposium of the IEEE/LEOS Benelux Chapter, December 17-18, 2007, Brussels, Belgium - Brussels, Belgium Duration: 17 Dec 2007 → 18 Dec 2007

Conference

Conference	12th Annual Symposium of the IEEE/LEOS Benelux Chapter, December 17-18, 2007, Brussels, Belgium
Country/Territory	Belgium
City	Brussels
Period	17/12/07 → 18/12/07

Cite this

Xu, L., Leijtens, X. J. M., Vries, de, T., Oei, Y. S., Veldhoven, van, P. J., Nötzel, R., & Smit, M. K. (2007). Efficient deeply etched InP/InGaAsP phase shifters with low dark current. In M. Delqué, P. Emplit, S. P. Gorza, P. Kockaert, & X. J. M. Leijtens (Eds.), Proceedings of the 12th Annual Symposium of the IEEE/LEOS Benelux Chapter, 17-18 December 2007, Brussels, Belgium (pp. 115-118). IEEE/LEOS.

@inproceedings{1b06eeeb12314a5c9655469544229ade,

title = "Efficient deeply etched InP/InGaAsP phase shifters with low dark current",

author = "L. Xu and X.J.M. Leijtens and {Vries, de}, T. and Y.S. Oei and {Veldhoven, van}, P.J. and R. N{\"o}tzel and M.K. Smit",

year = "2007",

language = "English",

isbn = "978-2-9600753-0-4",

pages = "115--118",

editor = "M. Delqu{\'e} and Ph. Emplit and S.P. Gorza and P. Kockaert and X.J.M. Leijtens",

booktitle = "Proceedings of the 12th Annual Symposium of the IEEE/LEOS Benelux Chapter, 17-18 December 2007, Brussels, Belgium",

publisher = "IEEE/LEOS",

note = "12th Annual Symposium of the IEEE/LEOS Benelux Chapter, December 17-18, 2007, Brussels, Belgium ; Conference date: 17-12-2007 Through 18-12-2007",

}

Xu, L, Leijtens, XJM, Vries, de, T, Oei, YS, Veldhoven, van, PJ, Nötzel, R & Smit, MK 2007, Efficient deeply etched InP/InGaAsP phase shifters with low dark current. in M Delqué, P Emplit, SP Gorza, P Kockaert & XJM Leijtens (eds), Proceedings of the 12th Annual Symposium of the IEEE/LEOS Benelux Chapter, 17-18 December 2007, Brussels, Belgium. IEEE/LEOS, Brussels, pp. 115-118, 12th Annual Symposium of the IEEE/LEOS Benelux Chapter, December 17-18, 2007, Brussels, Belgium, Brussels, Belgium, 17/12/07.

Efficient deeply etched InP/InGaAsP phase shifters with low dark current. / Xu, L.; Leijtens, X.J.M.; Vries, de, T. et al.
Proceedings of the 12th Annual Symposium of the IEEE/LEOS Benelux Chapter, 17-18 December 2007, Brussels, Belgium. ed. / M. Delqué; Ph. Emplit; S.P. Gorza; P. Kockaert; X.J.M. Leijtens. Brussels: IEEE/LEOS, 2007. p. 115-118.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Efficient deeply etched InP/InGaAsP phase shifters with low dark current

AU - Xu, L.

AU - Leijtens, X.J.M.

AU - Vries, de, T.

AU - Oei, Y.S.

AU - Veldhoven, van, P.J.

AU - Nötzel, R.

AU - Smit, M.K.

PY - 2007

Y1 - 2007

M3 - Conference contribution

SN - 978-2-9600753-0-4

SP - 115

EP - 118

BT - Proceedings of the 12th Annual Symposium of the IEEE/LEOS Benelux Chapter, 17-18 December 2007, Brussels, Belgium

A2 - Delqué, M.

A2 - Emplit, Ph.

A2 - Gorza, S.P.

A2 - Kockaert, P.

A2 - Leijtens, X.J.M.

PB - IEEE/LEOS

CY - Brussels

T2 - 12th Annual Symposium of the IEEE/LEOS Benelux Chapter, December 17-18, 2007, Brussels, Belgium

Y2 - 17 December 2007 through 18 December 2007

ER -

Xu L, Leijtens XJM, Vries, de T, Oei YS, Veldhoven, van PJ, Nötzel R et al. Efficient deeply etched InP/InGaAsP phase shifters with low dark current. In Delqué M, Emplit P, Gorza SP, Kockaert P, Leijtens XJM, editors, Proceedings of the 12th Annual Symposium of the IEEE/LEOS Benelux Chapter, 17-18 December 2007, Brussels, Belgium. Brussels: IEEE/LEOS. 2007. p. 115-118