Efficient deeply etched InP/InGaAsP phase shifters with low dark current

L. Xu, X.J.M. Leijtens, T. Vries, de, Y.S. Oei, P.J. Veldhoven, van, R. Nötzel, M.K. Smit

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProceedings of the 12th Annual Symposium of the IEEE/LEOS Benelux Chapter, 17-18 December 2007, Brussels, Belgium
EditorsM. Delqué, Ph. Emplit, S.P. Gorza, P. Kockaert, X.J.M. Leijtens
Place of PublicationBrussels
PublisherIEEE/LEOS
Pages115-118
ISBN (Print)978-2-9600753-0-4
Publication statusPublished - 2007
Event12th Annual Symposium of the IEEE/LEOS Benelux Chapter, December 17-18, 2007, Brussels, Belgium - Brussels, Belgium
Duration: 17 Dec 200718 Dec 2007

Conference

Conference12th Annual Symposium of the IEEE/LEOS Benelux Chapter, December 17-18, 2007, Brussels, Belgium
CountryBelgium
CityBrussels
Period17/12/0718/12/07

Cite this

Xu, L., Leijtens, X. J. M., Vries, de, T., Oei, Y. S., Veldhoven, van, P. J., Nötzel, R., & Smit, M. K. (2007). Efficient deeply etched InP/InGaAsP phase shifters with low dark current. In M. Delqué, P. Emplit, S. P. Gorza, P. Kockaert, & X. J. M. Leijtens (Eds.), Proceedings of the 12th Annual Symposium of the IEEE/LEOS Benelux Chapter, 17-18 December 2007, Brussels, Belgium (pp. 115-118). IEEE/LEOS.