@inproceedings{1b06eeeb12314a5c9655469544229ade,
title = "Efficient deeply etched InP/InGaAsP phase shifters with low dark current",
author = "L. Xu and X.J.M. Leijtens and {Vries, de}, T. and Y.S. Oei and {Veldhoven, van}, P.J. and R. N{\"o}tzel and M.K. Smit",
year = "2007",
language = "English",
isbn = "978-2-9600753-0-4",
pages = "115--118",
editor = "M. Delqu{\'e} and Ph. Emplit and S.P. Gorza and P. Kockaert and X.J.M. Leijtens",
booktitle = "Proceedings of the 12th Annual Symposium of the IEEE/LEOS Benelux Chapter, 17-18 December 2007, Brussels, Belgium",
publisher = "IEEE/LEOS",
note = "12th Annual Symposium of the IEEE/LEOS Benelux Chapter, December 17-18, 2007, Brussels, Belgium ; Conference date: 17-12-2007 Through 18-12-2007",
}