Efficient computational schemes for electromagnetic scattering analysis by bodies of revolution with applications to optical scatterometry

Fahimeh Sepehripour

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Electrical Engineering
Supervisors/Advisors	van Beurden, Martijn C., Promotor de Hon, Bas P., Copromotor
Award date	14 Jan 2025
Place of Publication	Eindhoven
Publisher	Eindhoven University of Technology
Print ISBNs	978-90-386-6190-2
Publication status	Published - 14 Jan 2025

Proefschrift.

Access to Document

@phdthesis{700f5b58a0064b9b987982a7b6fbe5bb,

title = "Efficient computational schemes for electromagnetic scattering analysis by bodies of revolution with applications to optical scatterometry",

author = "Fahimeh Sepehripour",

note = "Proefschrift.",

year = "2025",

month = jan,

day = "14",

language = "English",

isbn = "978-90-386-6190-2",

publisher = "Eindhoven University of Technology",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Electrical Engineering",

}