Efficient and fabrication error tolerant grating couplers on the InP membrane on silicon platform

Amir Kashi (Corresponding author), Jos J.G.M. van der Tol, Kevin A. Williams, Yuqing Jiao

Research output: Contribution to journalArticleAcademicpeer-review

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Abstract

In order to couple light between photonic integrated circuits and optical fibers, grating couplers are commonly employed. This paper describes the design and fabrication of deep and shallow-etched grating couplers with a metal back-reflector with record low insertion losses in InP-based platforms. The measured insertion losses for deep and shallow-etched gratings are 2.4 and 2.6 dB, respectively. Additionally, fabrication error tolerances in shallow etched grating couplers have been examined experimentally, which showed high tolerance of this structure toward the grating period and fill factor.
Original languageEnglish
Pages (from-to)9926-9936
Number of pages11
JournalApplied Optics
Volume61
Issue number33
DOIs
Publication statusPublished - 20 Nov 2022

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