Effects of eddy currents due to a vacuum chamber wall in the airgap of a moving-magnet linear actuator

This paper discusses the effects of eddy currents induced in an electrically conducting plate whichis placed in the airgap of a linear synchronous actuator with moving permanent magnets. The eddy currents induced in this plate, which is part of a controlled atmosphere chamber, cause not only damping but also deteriorate the actuator performance by disturbing the position measurement with Hall sensors. Furthermore, feed-forward controllers are less effective due to the suppression of high frequent armature fields. These effects are analyzed with an analytical model and verified with finite element simulations and measurements.