Effective passivation of silicon surfaces by ultrathin atomic-layer deposited niobium oxide

B. Macco, M. Bivour, J.H. Deijkers, S.B. Basuvalingam, L.E. Black, J. Melskens, B.W.H. van de Loo, W.J.H. Berghuis, M. Hermle, W.M.M. Kessels

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Physics & Astronomy