Abstract
The plasma properties of a capacitively coupled atmospheric pressure plasma in Argon as a function of the driving frequency fd is studied for a number of frequencies in the range 4–40 MHz by means of a 2D fluid model. It is observed that the increase of fd while keeping the applied voltage constant results into amplification of the chemical processes. More neutral active species are produced, which is mainly due to the increase of the electron density ne. However the increase of ne will also facilitate the destruction of excited species Ar* so that the increase of excited species density n(Ar*) will lag behind that of ne.
| Original language | English |
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| Title of host publication | Proceedings of the 21st Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases (ESCAMPIG XXI), 10-14 July 2012, Viana do Castelo, Portugal |
| Publication status | Published - 2012 |
| Event | 21st Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases (ESCAMPIG XXI), July 10-14, 2012, Viana do Castelo, Portugal - Viana do Castelo, Portugal Duration: 10 Jul 2012 → 14 Jul 2012 |
Conference
| Conference | 21st Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases (ESCAMPIG XXI), July 10-14, 2012, Viana do Castelo, Portugal |
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| Abbreviated title | ESCAMPIG XXI |
| Country/Territory | Portugal |
| City | Viana do Castelo |
| Period | 10/07/12 → 14/07/12 |