Effect of the driving frequency on an atmospheric pressure RF capacitively coupled plasma in Argon

M. Atanasova, E.A.D. Carbone, G. Degrez, J.J.A.M. Mullen, van der

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

The plasma properties of a capacitively coupled atmospheric pressure plasma in Argon as a function of the driving frequency fd is studied for a number of frequencies in the range 4–40 MHz by means of a 2D fluid model. It is observed that the increase of fd while keeping the applied voltage constant results into amplification of the chemical processes. More neutral active species are produced, which is mainly due to the increase of the electron density ne. However the increase of ne will also facilitate the destruction of excited species Ar* so that the increase of excited species density n(Ar*) will lag behind that of ne.
Original languageEnglish
Title of host publicationProceedings of the 21st Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases (ESCAMPIG XXI), 10-14 July 2012, Viana do Castelo, Portugal
Publication statusPublished - 2012
Event21st Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases (ESCAMPIG XXI), July 10-14, 2012, Viana do Castelo, Portugal - Viana do Castelo, Portugal
Duration: 10 Jul 201214 Jul 2012

Conference

Conference21st Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases (ESCAMPIG XXI), July 10-14, 2012, Viana do Castelo, Portugal
Abbreviated titleESCAMPIG XXI
CountryPortugal
CityViana do Castelo
Period10/07/1214/07/12

Fingerprint

Dive into the research topics of 'Effect of the driving frequency on an atmospheric pressure RF capacitively coupled plasma in Argon'. Together they form a unique fingerprint.

Cite this