Effect of atomic deuterium on a-Si:H thin films

S. Agarwal; L. Tagawa; D. Maroudas; E.S. Aydil; M.C.M. Sanden, van de; A. Takano

Effect of atomic deuterium on a-Si:H thin films

S. Agarwal, L. Tagawa, D. Maroudas, E.S. Aydil, M.C.M. Sanden, van de, A. Takano

Plasma & Materials Processing

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

No abstract.

Original language	English
Title of host publication	Frontiers in low temperature plasma diagnostics IV : papers, Rolduc Conference Centre, The Netherlands, 25.03.2001-29.03.2001
Place of Publication	Eindhoven
Publisher	Eindhoven University of Technology
Pages	91-
Publication status	Published - 2001

Cite this

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title = "Effect of atomic deuterium on a-Si:H thin films",

abstract = "No abstract.",

author = "S. Agarwal and L. Tagawa and D. Maroudas and E.S. Aydil and {Sanden, van de}, M.C.M. and A. Takano",

year = "2001",

language = "English",

pages = "91--",

booktitle = "Frontiers in low temperature plasma diagnostics IV : papers, Rolduc Conference Centre, The Netherlands, 25.03.2001-29.03.2001",

publisher = "Eindhoven University of Technology",

}

Effect of atomic deuterium on a-Si:H thin films. / Agarwal, S.; Tagawa, L.; Maroudas, D.; Aydil, E.S.; Sanden, van de, M.C.M.; Takano, A.

Frontiers in low temperature plasma diagnostics IV : papers, Rolduc Conference Centre, The Netherlands, 25.03.2001-29.03.2001. Eindhoven : Eindhoven University of Technology, 2001. p. 91-.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Effect of atomic deuterium on a-Si:H thin films

AU - Agarwal, S.

AU - Tagawa, L.

AU - Maroudas, D.

AU - Aydil, E.S.

AU - Sanden, van de, M.C.M.

AU - Takano, A.

PY - 2001

Y1 - 2001

N2 - No abstract.

AB - No abstract.

M3 - Conference contribution

SP - 91-

BT - Frontiers in low temperature plasma diagnostics IV : papers, Rolduc Conference Centre, The Netherlands, 25.03.2001-29.03.2001

PB - Eindhoven University of Technology

CY - Eindhoven

ER -

Effect of atomic deuterium on a-Si:H thin films

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