Effect of atomic deuterium on a-Si:H thin films

S. Agarwal, L. Tagawa, D. Maroudas, E.S. Aydil, M.C.M. Sanden, van de, A. Takano

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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No abstract.
Original languageEnglish
Title of host publicationFrontiers in low temperature plasma diagnostics IV : papers, Rolduc Conference Centre, The Netherlands, 25.03.2001-29.03.2001
Place of PublicationEindhoven
PublisherEindhoven University of Technology
Publication statusPublished - 2001


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