Effect of atomic deuterium on a-Si:H thin films

S. Agarwal, L. Tagawa, D. Maroudas, E.S. Aydil, M.C.M. Sanden, van de, A. Takano

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Abstract

No abstract.
Original languageEnglish
Title of host publicationFrontiers in low temperature plasma diagnostics IV : papers, Rolduc Conference Centre, The Netherlands, 25.03.2001-29.03.2001
Place of PublicationEindhoven
PublisherEindhoven University of Technology
Pages91-
Publication statusPublished - 2001

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    Agarwal, S., Tagawa, L., Maroudas, D., Aydil, E. S., Sanden, van de, M. C. M., & Takano, A. (2001). Effect of atomic deuterium on a-Si:H thin films. In Frontiers in low temperature plasma diagnostics IV : papers, Rolduc Conference Centre, The Netherlands, 25.03.2001-29.03.2001 (pp. 91-). Eindhoven University of Technology.