ECS Transactions: Preface

J. Flake; T. Ritzdorf; M. Koyangi; O. Leonte; G.S. Mathad; P. Ramm; H.S. Rathore; F. Roozeboom

ECS Transactions: Preface

J. Flake, T. Ritzdorf, M. Koyangi, O. Leonte, G.S. Mathad, P. Ramm, H.S. Rathore, F. Roozeboom

Plasma & Materials Processing

Research output: Contribution to journal › Editorial › Academic › peer-review

Original language	English
Pages (from-to)	iii-vi
Number of pages	3
Journal	ECS Transactions
Volume	33
Issue number	12
Publication status	Published - 1 Dec 2010
Event	Processing, Materials, and Integration of Damascene and 3D Interconnects - 218th ECS Meeting - Las Vegas, NV, United States Duration: 10 Oct 2010 → 15 Oct 2010

Cite this

@article{f5b4ff883cb14c13b8bcadf327f6dd58,

title = "ECS Transactions: Preface",

author = "J. Flake and T. Ritzdorf and M. Koyangi and O. Leonte and G.S. Mathad and P. Ramm and H.S. Rathore and F. Roozeboom",

year = "2010",

month = dec,

day = "1",

language = "English",

volume = "33",

pages = "iii--vi",

journal = "ECS Transactions",

issn = "1938-5862",

publisher = "Electrochemical Society, Inc.",

number = "12",

note = "Processing, Materials, and Integration of Damascene and 3D Interconnects - 218th ECS Meeting ; Conference date: 10-10-2010 Through 15-10-2010",

}

TY - JOUR

T1 - ECS Transactions

T2 - Processing, Materials, and Integration of Damascene and 3D Interconnects - 218th ECS Meeting

AU - Flake, J.

AU - Ritzdorf, T.

AU - Koyangi, M.

AU - Leonte, O.

AU - Mathad, G.S.

AU - Ramm, P.

AU - Rathore, H.S.

AU - Roozeboom, F.

PY - 2010/12/1

Y1 - 2010/12/1

UR - http://www.scopus.com/inward/record.url?scp=84857395514&partnerID=8YFLogxK

M3 - Editorial

AN - SCOPUS:84857395514

SN - 1938-5862

VL - 33

SP - iii-vi

JO - ECS Transactions

JF - ECS Transactions

IS - 12

Y2 - 10 October 2010 through 15 October 2010

ER -

ECS Transactions: Preface

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