@inproceedings{e2ee81f57c7940be963ca8ccb70a0630,
title = "E-beam evaporated multilayer soft x-ray coatings, analyzed with cu-k radiation",
abstract = "Results are presented for deposition of multilayer soft X-ray coatings, monitored during deposition with soft X-ray reflection and analyzed afterwards with Cu-Ka reflection. Some calculations on and simulation of non ideal behaviour of multilayer coatings are presented, mainly focussed on roughness problems. Experimental results for e-beam evaporated and sputter-deposited multilayers are compared and a discussion of possible causes for the differences is given.",
author = "M.P. Bruijn and P. Chakraborty and {van Essen}, H. and J. Verhoeven and {van der Wiel}, M.J. and W.J. Bartels",
year = "1985",
month = aug,
day = "6",
doi = "10.1117/12.949667",
language = "English",
series = "Proceedings of SPIE",
publisher = "SPIE",
pages = "182--194",
booktitle = "Applications of Thin Film Multilayered Structures to Figured X-Ray Optics",
address = "United States",
note = "29th Annual Technical Symposium ; Conference date: 20-08-1985 Through 23-08-1985",
}