E-beam evaporated multilayer soft x-ray coatings, analyzed with cu-k radiation

M. P. Bruijn, P. Chakraborty, H. Van Essen, J. Verhoeven, M. J. Van Der Wiel, W. J. Bartels

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

13 Citations (Scopus)

Abstract

Results are presented for deposition of multilayer soft X-ray coatings, monitored during deposition with soft X-ray reflection and analyzed afterwards with Cu-Ka reflection. Some calculations on and simulation of non ideal behaviour of multilayer coatings are presented, mainly focussed on roughness problems. Experimental results for e-beam evaporated and sputter-deposited multilayers are compared and a discussion of possible causes for the differences is given.

Original languageEnglish
Title of host publicationApplications of Thin Film Multilayered Structures to Figured X-Ray Optics
PublisherSPIE
Pages182-194
Number of pages13
DOIs
Publication statusPublished - 6 Aug 1985
Event29th Annual Technical Symposium - San Diego, United States
Duration: 20 Aug 198523 Aug 1985

Publication series

NameProceedings of SPIE
Volume563

Conference

Conference29th Annual Technical Symposium
CountryUnited States
CitySan Diego
Period20/08/8523/08/85

Bibliographical note

Copyright:
Copyright 2016 Elsevier B.V., All rights reserved.

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