Results are presented for deposition of multilayer soft X-ray coatings, monitored during deposition with soft X-ray reflection and analyzed afterwards with Cu-Ka reflection. Some calculations on and simulation of non ideal behaviour of multilayer coatings are presented, mainly focussed on roughness problems. Experimental results for e-beam evaporated and sputter-deposited multilayers are compared and a discussion of possible causes for the differences is given.
|Title of host publication||Applications of Thin Film Multilayered Structures to Figured X-Ray Optics|
|Number of pages||13|
|Publication status||Published - 6 Aug 1985|
|Event||29th Annual Technical Symposium - San Diego, United States|
Duration: 20 Aug 1985 → 23 Aug 1985
|Name||Proceedings of SPIE|
|Conference||29th Annual Technical Symposium|
|Period||20/08/85 → 23/08/85|
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