TY - JOUR
T1 - Dynamics of the atmospheric pressure diffuse dielectric barrier discharge between cylindrical electrodes in roll-to-roll PECVD reactor
AU - Starostine, S.A.
AU - Welzel, S.
AU - Liu, Y.
AU - van der Velden-Schuermans, B.C.A.M.
AU - Bouwstra, J.B.
AU - van de Sanden, M.C.M.
AU - de Vries, H.W.
PY - 2015/7/1
Y1 - 2015/7/1
N2 - The high current diffuse dielectric barrier discharge (DBD) was operated in a bi-axial cylindrical electrode configuration using nitrogen, oxygen and argon gas flow with the addition of tetraethyl orthosilicate as precursor for silica-like film deposition. The behaviour of the transient plasma was visualized by means of fast imaging from two orthogonal directions. The formation and propagation (∼3 × 104 m s-1) of lateral ionization waves with the transverse light emission structure similar to the low pressure glow discharge was observed at time scales below 1 μs. Despite plasma non-uniformity at nanosecond time scale the deposition process on the web-rolled polymer results in smooth well adherent films with good film uniformity and excellent gas diffusion barrier properties.
AB - The high current diffuse dielectric barrier discharge (DBD) was operated in a bi-axial cylindrical electrode configuration using nitrogen, oxygen and argon gas flow with the addition of tetraethyl orthosilicate as precursor for silica-like film deposition. The behaviour of the transient plasma was visualized by means of fast imaging from two orthogonal directions. The formation and propagation (∼3 × 104 m s-1) of lateral ionization waves with the transverse light emission structure similar to the low pressure glow discharge was observed at time scales below 1 μs. Despite plasma non-uniformity at nanosecond time scale the deposition process on the web-rolled polymer results in smooth well adherent films with good film uniformity and excellent gas diffusion barrier properties.
UR - http://www.scopus.com/inward/record.url?scp=84937239556&partnerID=8YFLogxK
U2 - 10.1051/epjap/2015150026
DO - 10.1051/epjap/2015150026
M3 - Article
AN - SCOPUS:84937239556
SN - 1286-0042
VL - 71
SP - 1
EP - 6
JO - European Physical Journal : Applied Physics
JF - European Physical Journal : Applied Physics
IS - 2
M1 - 20803
ER -