Dynamics of the atmospheric pressure diffuse dielectric barrier discharge between cylindrical electrodes in roll-to-roll PECVD reactor

S.A. Starostine, S. Welzel, Y. Liu, B.C.A.M. van der Velden-Schuermans, J.B. Bouwstra, M.C.M. van de Sanden, H.W. de Vries

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6 Citations (Scopus)

Abstract

The high current diffuse dielectric barrier discharge (DBD) was operated in a bi-axial cylindrical electrode configuration using nitrogen, oxygen and argon gas flow with the addition of tetraethyl orthosilicate as precursor for silica-like film deposition. The behaviour of the transient plasma was visualized by means of fast imaging from two orthogonal directions. The formation and propagation (∼3 × 104 m s-1) of lateral ionization waves with the transverse light emission structure similar to the low pressure glow discharge was observed at time scales below 1 μs. Despite plasma non-uniformity at nanosecond time scale the deposition process on the web-rolled polymer results in smooth well adherent films with good film uniformity and excellent gas diffusion barrier properties.

Original languageEnglish
Article number20803
Pages (from-to)1-6
JournalEuropean Physical Journal : Applied Physics
Volume71
Issue number2
DOIs
Publication statusPublished - 1 Jul 2015

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