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Dynamics of ion assisted etching on a time scale 100 mus-1000 s

  • G.J.P. Joosten

Research output: Thesis › EngD Thesis

Original languageEnglish
Supervisors/Advisors
  • Beijerinck, Herman, Supervisor
Award date1 Jan 1993
Place of PublicationEindhoven
Publisher
Print ISBNs90-5282-240-9
Publication statusPublished - 1993

Bibliographical note

Eindverslag.

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