Dynamics of ion assisted etching on a time scale 100 mus-1000 s

G.J.P. Joosten, Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Korte onderzoekersopleiding Technische Natuurkunde

    Research output: ThesisPd Eng Thesis

    Original languageEnglish
    QualificationDoctor of Philosophy
    Awarding Institution
    Supervisors/Advisors
    • Beijerinck, Herman, Supervisor
    Award date1 Jan 1993
    Place of PublicationEindhoven
    Publisher
    Print ISBNs90-5282-240-9
    Publication statusPublished - 1993

    Bibliographical note

    Eindverslag.

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