Dynamics of ion-assisted etching

P.G.M. Sebel

    Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

    427 Downloads (Pure)
    Original languageEnglish
    QualificationDoctor of Philosophy
    Awarding Institution
    • Applied Physics
    Supervisors/Advisors
    • Beijerinck, Herman, Promotor
    • Hermans, Lodewijk J.F., Promotor, External person
    Award date13 Dec 1999
    Place of PublicationEindhoven
    Publisher
    Print ISBNs90-386-0927-2
    DOIs
    Publication statusPublished - 1999

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