Dynamic probe calibration using laser interferometry

H. Haitjema, G.J.W.L. Kotte

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationLaser Metrology for Precision Measurement and Inspection in Industry
Place of PublicationDenmark, Lyngby
Pages107-118
Publication statusPublished - 1996

Cite this

Haitjema, H., & Kotte, G. J. W. L. (1996). Dynamic probe calibration using laser interferometry. In Laser Metrology for Precision Measurement and Inspection in Industry (pp. 107-118).