Dynamic probe calibration using laser interferometry

H. Haitjema, G.J.W.L. Kotte

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationLaser Metrology for Precision Measurement and Inspection in Industry
Place of PublicationDenmark, Lyngby
Pages107-118
Publication statusPublished - 1996

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