Abstract
This paper describes two systems for dynamic probe calibrations which are in use at the Van Swinden Laboratory of the Netherlands Measurements Institute (NMi-VSL). The systems have in common that they enable both static and dynamic probe calibration using a laser interferometer. The displacements are generated using piezoelectric devices. Measurements are shown which illustrate the capabilities of the systems to characterize and calibrate fast-moving probes.
Original language | English |
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Pages (from-to) | 107-111 |
Journal | Measurement: Journal of the International Measurement Confederation |
Volume | 21 |
Issue number | 3 |
DOIs | |
Publication status | Published - 1997 |