This paper describes two systems for dynamic probe calibrations which are in use at the Van Swinden Laboratory of the Netherlands Measurements Institute (NMi-VSL). The systems have in common that they enable both static and dynamic probe calibration using a laser interferometer. The displacements are generated using piezoelectric devices. Measurements are shown which illustrate the capabilities of the systems to characterize and calibrate fast-moving probes.
|Journal||Measurement: Journal of the International Measurement Confederation|
|Publication status||Published - 1997|