Dynamic decoupling in motion systems using a gradient approximation-based algorithm

M.F. Heertjes, D.W.T. Hennekens, A..J.A. Engelen, van, M. Steinbuch

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

10 Citations (Scopus)
2 Downloads (Pure)


To reduce cross coupling in the control of multi-input multi-output (MIMO) motion systems having diagonal dominance, a dynamic decoupling design is studied. The dynamic decoupling is used in parallel to a nominal (and static) decoupling with the aim to support a straight-forward single-input single-output (SISO) control design. For a six degrees-of-freedom nano-accurate wafer stage, the off-diagonal entries of the dynamic decoupling matrix are given a fourth-order FIR filter structure as to counteract the coupled and dominant fourth-order plant behavior. The FIR filter coefficients are obtained using a gradient approximation-based algorithm which supports the means to obtain the optimized set of FIR coefficients through a limited set of perturbed-parameter experiments. In simulation, both performance as well as closed-loop stability are shown to be effectively dealt with.
Original languageEnglish
Title of host publicationProceedings of the 48th IEEE Conference on Decision and Control and 28th Chinese Control Conference (CDC / CCC), 16-18 december 2009, Shanghai, China
Place of PublicationPiscataway
PublisherInstitute of Electrical and Electronics Engineers
Publication statusPublished - 2009


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