Abstract
To reduce cross coupling in the control of multi-input multi-output (MIMO) motion systems having diagonal dominance, a dynamic decoupling design is studied. The dynamic decoupling is used in parallel to a nominal (and static) decoupling with the aim to support a straight-forward single-input single-output (SISO) control design. For a six degrees-of-freedom nano-accurate wafer stage, the off-diagonal entries of the dynamic decoupling matrix are given a fourth-order FIR filter structure as to counteract the coupled and dominant fourth-order plant behavior. The FIR filter coefficients are obtained using a gradient approximation-based algorithm which supports the means to obtain the optimized set of FIR coefficients through a limited set of perturbed-parameter experiments. In simulation, both performance as well as closed-loop stability are shown to be effectively dealt with.
Original language | English |
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Title of host publication | Proceedings of the 48th IEEE Conference on Decision and Control and 28th Chinese Control Conference (CDC / CCC), 16-18 december 2009, Shanghai, China |
Place of Publication | Piscataway |
Publisher | Institute of Electrical and Electronics Engineers |
Pages | 5086-5091 |
DOIs | |
Publication status | Published - 2009 |