Dynamic decoupling in motion systems using a gradient approximation-based algorithm

M.F. Heertjes; D.W.T. Hennekens; A..J.A. Engelen, van; M. Steinbuch

doi:10.1109/CDC.2009.5399757

Dynamic decoupling in motion systems using a gradient approximation-based algorithm

M.F. Heertjes, D.W.T. Hennekens, A..J.A. Engelen, van, M. Steinbuch

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

9 Citations (Scopus)

2 Downloads (Pure)

Abstract

To reduce cross coupling in the control of multi-input multi-output (MIMO) motion systems having diagonal dominance, a dynamic decoupling design is studied. The dynamic decoupling is used in parallel to a nominal (and static) decoupling with the aim to support a straight-forward single-input single-output (SISO) control design. For a six degrees-of-freedom nano-accurate wafer stage, the off-diagonal entries of the dynamic decoupling matrix are given a fourth-order FIR filter structure as to counteract the coupled and dominant fourth-order plant behavior. The FIR filter coefficients are obtained using a gradient approximation-based algorithm which supports the means to obtain the optimized set of FIR coefficients through a limited set of perturbed-parameter experiments. In simulation, both performance as well as closed-loop stability are shown to be effectively dealt with.

Original language	English
Title of host publication	Proceedings of the 48th IEEE Conference on Decision and Control and 28th Chinese Control Conference (CDC / CCC), 16-18 december 2009, Shanghai, China
Place of Publication	Piscataway
Publisher	Institute of Electrical and Electronics Engineers
Pages	5086-5091
DOIs	https://doi.org/10.1109/CDC.2009.5399757
Publication status	Published - 2009

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Heertjes, M. F., Hennekens, D. W. T., Engelen, van, A. J. A., & Steinbuch, M. (2009). Dynamic decoupling in motion systems using a gradient approximation-based algorithm. In Proceedings of the 48th IEEE Conference on Decision and Control and 28th Chinese Control Conference (CDC / CCC), 16-18 december 2009, Shanghai, China (pp. 5086-5091). Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/CDC.2009.5399757

Heertjes, M.F. ; Hennekens, D.W.T. ; Engelen, van, A..J.A. ; Steinbuch, M. / Dynamic decoupling in motion systems using a gradient approximation-based algorithm. Proceedings of the 48th IEEE Conference on Decision and Control and 28th Chinese Control Conference (CDC / CCC), 16-18 december 2009, Shanghai, China. Piscataway : Institute of Electrical and Electronics Engineers, 2009. pp. 5086-5091

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Heertjes, MF, Hennekens, DWT, Engelen, van, AJA & Steinbuch, M 2009, Dynamic decoupling in motion systems using a gradient approximation-based algorithm. in Proceedings of the 48th IEEE Conference on Decision and Control and 28th Chinese Control Conference (CDC / CCC), 16-18 december 2009, Shanghai, China. Institute of Electrical and Electronics Engineers, Piscataway, pp. 5086-5091. https://doi.org/10.1109/CDC.2009.5399757

Dynamic decoupling in motion systems using a gradient approximation-based algorithm. / Heertjes, M.F.; Hennekens, D.W.T.; Engelen, van, A..J.A.; Steinbuch, M.

Proceedings of the 48th IEEE Conference on Decision and Control and 28th Chinese Control Conference (CDC / CCC), 16-18 december 2009, Shanghai, China. Piscataway : Institute of Electrical and Electronics Engineers, 2009. p. 5086-5091.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Heertjes MF, Hennekens DWT, Engelen, van AJA, Steinbuch M. Dynamic decoupling in motion systems using a gradient approximation-based algorithm. In Proceedings of the 48th IEEE Conference on Decision and Control and 28th Chinese Control Conference (CDC / CCC), 16-18 december 2009, Shanghai, China. Piscataway: Institute of Electrical and Electronics Engineers. 2009. p. 5086-5091 https://doi.org/10.1109/CDC.2009.5399757