Dynamic aspects of cost of ownership of lithography systems

J.M. Santen, van; Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Intelligent Products and Production Systems (IPPS)

Dynamic aspects of cost of ownership of lithography systems

J.M. Santen, van, Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Intelligent Products and Production Systems (IPPS)

Research output: Thesis › EngD Thesis

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution
Supervisors/Advisors	de Ron, Ad, Supervisor Lenders, H., External supervisor, External person
Award date	1 Jan 2003
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven. Stan Ackermans Instituut
Print ISBNs	90-444-0338-9
Publication status	Published - 2003

Bibliographical note

Eindverslag

Cite this

@phdthesis{29b0648c60ab46578be6f399e6d327b5,

title = "Dynamic aspects of cost of ownership of lithography systems",

author = "{Santen, van}, J.M. and {Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Intelligent Products and Production Systems (IPPS)}",

note = "Eindverslag",

year = "2003",

language = "English",

isbn = "90-444-0338-9",

publisher = "Technische Universiteit Eindhoven. Stan Ackermans Instituut",

type = "EngD Thesis",

}

TY - THES

T1 - Dynamic aspects of cost of ownership of lithography systems

AU - Santen, van, J.M.

AU - Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Intelligent Products and Production Systems (IPPS)

N1 - Eindverslag

PY - 2003

Y1 - 2003

M3 - EngD Thesis

SN - 90-444-0338-9

PB - Technische Universiteit Eindhoven. Stan Ackermans Instituut

CY - Eindhoven

ER -