Dynamic aspects of cost of ownership of lithography systems

J.M. Santen, van, Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Intelligent Products and Production Systems (IPPS)

    Research output: ThesisPd Eng Thesis

    Original languageEnglish
    QualificationDoctor of Philosophy
    Awarding Institution
    Supervisors/Advisors
    • de Ron, Ad, Supervisor
    • Lenders, H., External supervisor, External person
    Award date1 Jan 2003
    Place of PublicationEindhoven
    Publisher
    Print ISBNs90-444-0338-9
    Publication statusPublished - 2003

    Bibliographical note

    Eindverslag

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