Dual-mode device for in situ testing of MEMS packaging quality

M.A.G. Suijlen; C. Avoort, van der; J.T.M. van Beek; J.J. Koning; H.C.W. Beijerinck

doi:10.1016/j.sna.2011.12.039

Dual-mode device for in situ testing of MEMS packaging quality

M.A.G. Suijlen, C. Avoort, van der, J.T.M. van Beek, J.J. Koning, H.C.W. Beijerinck

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Abstract

A method is presented to rapidly characterize the hermeticity of a vacuum cavity for a high frequency (omega(0)/(2 pi)= 56 MHz) micromechanical bulk-wave resonator. The method relies on operating the device in a low-stiffness out-of-plane resonance mode. By monitoring the Q-factor and resonance frequency shift of this out-of-plane mode, the pressure change inside the cavity can be measured with a sensitivity that is 100-1000 times higher than when using the functional bulk mode. This high sensitivity pressure sensing is vital for estimating the life-time of vacuum packaged resonators within a limited test-time. The experimental results are well described by the squeeze-film damping model of Suijlen et al. [27] and the classical predictions for kinetic damping and drag forces based on gas kinetic theory, within the experimental error of 15% for Q and 3% for Delta omega(0). For this purpose the model has been extended to include the effect of coupled squeeze-film boxes, which can be expressed in terms of an effective gap height and an effective escape time. (C) 2011 Elsevier B.V. All rights reserved

Original language	English
Pages (from-to)	139-149
Number of pages	11
Journal	Sensors and Actuators, A: Physical
Volume	175
DOIs	https://doi.org/10.1016/j.sna.2011.12.039
Publication status	Published - 2012

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@article{b57d213fac994f5488e89a1cfabf17f9,

title = "Dual-mode device for in situ testing of MEMS packaging quality",

abstract = "A method is presented to rapidly characterize the hermeticity of a vacuum cavity for a high frequency (omega(0)/(2 pi)= 56 MHz) micromechanical bulk-wave resonator. The method relies on operating the device in a low-stiffness out-of-plane resonance mode. By monitoring the Q-factor and resonance frequency shift of this out-of-plane mode, the pressure change inside the cavity can be measured with a sensitivity that is 100-1000 times higher than when using the functional bulk mode. This high sensitivity pressure sensing is vital for estimating the life-time of vacuum packaged resonators within a limited test-time. The experimental results are well described by the squeeze-film damping model of Suijlen et al. [27] and the classical predictions for kinetic damping and drag forces based on gas kinetic theory, within the experimental error of 15% for Q and 3% for Delta omega(0). For this purpose the model has been extended to include the effect of coupled squeeze-film boxes, which can be expressed in terms of an effective gap height and an effective escape time. (C) 2011 Elsevier B.V. All rights reserved",

author = "M.A.G. Suijlen and {Avoort, van der}, C. and {van Beek}, J.T.M. and J.J. Koning and H.C.W. Beijerinck",

year = "2012",

doi = "10.1016/j.sna.2011.12.039",

language = "English",

volume = "175",

pages = "139--149",

journal = "Sensors and Actuators, A: Physical",

issn = "0924-4247",

publisher = "Elsevier B.V.",

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TY - JOUR

T1 - Dual-mode device for in situ testing of MEMS packaging quality

AU - Suijlen, M.A.G.

AU - Avoort, van der, C.

AU - van Beek, J.T.M.

AU - Koning, J.J.

AU - Beijerinck, H.C.W.

PY - 2012

Y1 - 2012

N2 - A method is presented to rapidly characterize the hermeticity of a vacuum cavity for a high frequency (omega(0)/(2 pi)= 56 MHz) micromechanical bulk-wave resonator. The method relies on operating the device in a low-stiffness out-of-plane resonance mode. By monitoring the Q-factor and resonance frequency shift of this out-of-plane mode, the pressure change inside the cavity can be measured with a sensitivity that is 100-1000 times higher than when using the functional bulk mode. This high sensitivity pressure sensing is vital for estimating the life-time of vacuum packaged resonators within a limited test-time. The experimental results are well described by the squeeze-film damping model of Suijlen et al. [27] and the classical predictions for kinetic damping and drag forces based on gas kinetic theory, within the experimental error of 15% for Q and 3% for Delta omega(0). For this purpose the model has been extended to include the effect of coupled squeeze-film boxes, which can be expressed in terms of an effective gap height and an effective escape time. (C) 2011 Elsevier B.V. All rights reserved

AB - A method is presented to rapidly characterize the hermeticity of a vacuum cavity for a high frequency (omega(0)/(2 pi)= 56 MHz) micromechanical bulk-wave resonator. The method relies on operating the device in a low-stiffness out-of-plane resonance mode. By monitoring the Q-factor and resonance frequency shift of this out-of-plane mode, the pressure change inside the cavity can be measured with a sensitivity that is 100-1000 times higher than when using the functional bulk mode. This high sensitivity pressure sensing is vital for estimating the life-time of vacuum packaged resonators within a limited test-time. The experimental results are well described by the squeeze-film damping model of Suijlen et al. [27] and the classical predictions for kinetic damping and drag forces based on gas kinetic theory, within the experimental error of 15% for Q and 3% for Delta omega(0). For this purpose the model has been extended to include the effect of coupled squeeze-film boxes, which can be expressed in terms of an effective gap height and an effective escape time. (C) 2011 Elsevier B.V. All rights reserved

U2 - 10.1016/j.sna.2011.12.039

DO - 10.1016/j.sna.2011.12.039

M3 - Article

SN - 0924-4247

VL - 175

SP - 139

EP - 149

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

ER -

Dual-mode device for in situ testing of MEMS packaging quality

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