Downstream deposition of carbon nitride thin film using an RF plasma jet

G. Dinescu; E. Aldea; P. Boieriu; G. Musa; A. Andrei; V. Sandu; G.J.H. Brussaard; R.J. Severens; M.C.M. Sanden, van de; D.C. Schram

Downstream deposition of carbon nitride thin film using an RF plasma jet

G. Dinescu
, E. Aldea
, P. Boieriu
, G. Musa
, A. Andrei
, V. Sandu
, G.J.H. Brussaard
, R.J. Severens
, M.C.M. Sanden, van de
, D.C. Schram

Plasma & Materials Processing

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

1 Downloads (Pure)

Original language	English
Title of host publication	IXth conference on plasma physics and applications : Bucharest, June 27-30, 1996 : abstracts
Pages	P36
Publication status	Published - 1996

Cite this

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title = "Downstream deposition of carbon nitride thin film using an RF plasma jet",

author = "G. Dinescu and E. Aldea and P. Boieriu and G. Musa and A. Andrei and V. Sandu and G.J.H. Brussaard and R.J. Severens and \{Sanden, van de\}, M.C.M. and D.C. Schram",

year = "1996",

language = "English",

pages = "P36",

booktitle = "IXth conference on plasma physics and applications : Bucharest, June 27-30, 1996 : abstracts",

}

TY - GEN

T1 - Downstream deposition of carbon nitride thin film using an RF plasma jet

AU - Dinescu, G.

AU - Aldea, E.

AU - Boieriu, P.

AU - Musa, G.

AU - Andrei, A.

AU - Sandu, V.

AU - Brussaard, G.J.H.

AU - Severens, R.J.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

PY - 1996

Y1 - 1996

M3 - Conference contribution

SP - P36

BT - IXth conference on plasma physics and applications : Bucharest, June 27-30, 1996 : abstracts

ER -