Downstream deposition of carbon nitride thin film using an RF plasma jet

G. Dinescu, E. Aldea, P. Boieriu, G. Musa, A. Andrei, V. Sandu, G.J.H. Brussaard, R.J. Severens, M.C.M. Sanden, van de, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Original languageEnglish
Title of host publicationIXth conference on plasma physics and applications : Bucharest, June 27-30, 1996 : abstracts
Publication statusPublished - 1996

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