Downstream deposition of carbon nitride thin film using an RF plasma jet

G. Dinescu; E. Aldea; P. Boieriu; G. Musa; A. Andrei; V. Sandu; G.J.H. Brussaard; R.J. Severens; M.C.M. Sanden, van de; D.C. Schram

Downstream deposition of carbon nitride thin film using an RF plasma jet

G. Dinescu, E. Aldea, P. Boieriu, G. Musa, A. Andrei, V. Sandu, G.J.H. Brussaard, R.J. Severens, M.C.M. Sanden, van de, D.C. Schram

Plasma & Materials Processing

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Original language	English
Title of host publication	IXth conference on plasma physics and applications : Bucharest, June 27-30, 1996 : abstracts
Pages	P36
Publication status	Published - 1996

Cite this

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title = "Downstream deposition of carbon nitride thin film using an RF plasma jet",

author = "G. Dinescu and E. Aldea and P. Boieriu and G. Musa and A. Andrei and V. Sandu and G.J.H. Brussaard and R.J. Severens and {Sanden, van de}, M.C.M. and D.C. Schram",

year = "1996",

language = "English",

pages = "P36",

booktitle = "IXth conference on plasma physics and applications : Bucharest, June 27-30, 1996 : abstracts",

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TY - GEN

T1 - Downstream deposition of carbon nitride thin film using an RF plasma jet

AU - Dinescu, G.

AU - Aldea, E.

AU - Boieriu, P.

AU - Musa, G.

AU - Andrei, A.

AU - Sandu, V.

AU - Brussaard, G.J.H.

AU - Severens, R.J.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

PY - 1996

Y1 - 1996

M3 - Conference contribution

SP - P36

BT - IXth conference on plasma physics and applications : Bucharest, June 27-30, 1996 : abstracts

ER -