The synthesis and the deposition of C nitride thin films with a new technique, downstream deposition from a RF generated, capacitively coupled N plasma beam with C electrodes are reported. The films obtained at room temp. are amorphous and contain C to N bonding, as revealed by XRD and FTIR studies. [on SciFinder (R)]
|Journal||Romanian Reports in Physics|
|Publication status||Published - 1997|
Dinescu, G., Aldea, E., Boieriu, P., Musa, G., Andrei, A., Sandu, V., Brussaard, G. J. H., Severens, R. J., Sanden, van de, M. C. M., & Schram, D. C. (1997). Downstream deposition of carbon nitride thin film using an RF plasma jet. Romanian Reports in Physics, 49(3-4), 309-313.