Double-sided processing for membrane-based photonic integration

L. Shen, Y. Jiao, A. Higuera Rodriguez, A.J. Millan Mejia, G.C. Roelkens, M.K. Smit, J.J.G.M. van der Tol

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

9 Downloads (Pure)

Original language	English
Title of host publication	European Conference on Integrated Optics (ECIO), 18-20 May 2016, Warsaw, Poland
Publication status	Published - 2016
Event	18th European Conference on Integrated Optics (ECIO 2016) - Warsaw University of Technology, Warsaw, Poland Duration: 18 May 2016 → 20 May 2016 Conference number: 18 http://ecio2016.imio.pw.edu.pl/

Conference	18th European Conference on Integrated Optics (ECIO 2016)
Abbreviated title	ECIO 2016
Country/Territory	Poland
City	Warsaw
Period	18/05/16 → 20/05/16
Internet address	http://ecio2016.imio.pw.edu.pl/

Cite this

@inproceedings{393d8d649ebb44a09b1a6fe360906663,

title = "Double-sided processing for membrane-based photonic integration",

author = "L. Shen and Y. Jiao and {Higuera Rodriguez}, A. and {Millan Mejia}, A.J. and G.C. Roelkens and M.K. Smit and {van der Tol}, J.J.G.M.",

year = "2016",

language = "English",

booktitle = "European Conference on Integrated Optics (ECIO), 18-20 May 2016, Warsaw, Poland",

note = "18th European Conference on Integrated Optics (ECIO 2016), ECIO 2016 ; Conference date: 18-05-2016 Through 20-05-2016",

url = "http://ecio2016.imio.pw.edu.pl/",

}

TY - GEN

T1 - Double-sided processing for membrane-based photonic integration

AU - Shen, L.

AU - Jiao, Y.

AU - Higuera Rodriguez, A.

AU - Millan Mejia, A.J.

AU - Roelkens, G.C.

AU - Smit, M.K.

AU - van der Tol, J.J.G.M.

N1 - Conference code: 18

PY - 2016

Y1 - 2016

M3 - Conference contribution

BT - European Conference on Integrated Optics (ECIO), 18-20 May 2016, Warsaw, Poland

T2 - 18th European Conference on Integrated Optics (ECIO 2016)

Y2 - 18 May 2016 through 20 May 2016

ER -