Dopant distribution in atomic layer deposited ZnO:Al films visualized by transmission electron microscopy and atom probe tomography

Y. Wu, A. Devin Giddings, M.A. Verheijen, B. Macco, T.J. Prosa, D.J. Larson, F. Roozeboom, W.M.M. Kessels

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Chemical Compounds

Engineering & Materials Science