Especially for use in the semiconductor industry, a displacement device ( 701 ) is disclosed comprising a first part comprising a carrier ( 714 ) on which a system of magnets ( 710 ) is arranged according to a pattern of row and columns extending parallel to the X-direction and the Y-direction, respectively. The magnets in each row and column are arranged according to a Halbach array, i.e. the magnetic orientation of successive magnets in each row and each column rotates 90 DEG counter-clockwise. The second part comprises an electric coil system ( 712 ) with two types of electric coils, one type having an angular offset of +45 DEG , and the other type having an offset of -45 DEG with respect to the X-direction. The first part ( 714, 710 ) is movable over a range of centimeters or more with respect to the stationary second part ( 712 ). For high precision positioning of the first part, an interferometer system ( 731, 730 ) is provided.
|Publication status||Published - 28 Aug 2008|