Directional repetitive control of a metrological AFM

M.J.C. Ronde, R.J.E. Merry, M.J.G. Molengraft, van de, M. Steinbuch, K.R. Koops, M.G.A. Veghel, van

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Abstract

abstract only

Original language	English
Title of host publication	Proceedings of the 28th Benelux Meeting on Systems and Control, March 16-18, 2009, Spa, Belgium
Place of Publication	Spa, Belgium
Publisher	Université de Liège
Pages	148-
Publication status	Published - 2009

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title = "Directional repetitive control of a metrological AFM",

abstract = "abstract only",

author = "M.J.C. Ronde and R.J.E. Merry and {Molengraft, van de}, M.J.G. and M. Steinbuch and K.R. Koops and {Veghel, van}, M.G.A.",

year = "2009",

language = "English",

pages = "148--",

booktitle = "Proceedings of the 28th Benelux Meeting on Systems and Control, March 16-18, 2009, Spa, Belgium",

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Directional repetitive control of a metrological AFM. / Ronde, M.J.C.; Merry, R.J.E.; Molengraft, van de, M.J.G. et al.
Proceedings of the 28th Benelux Meeting on Systems and Control, March 16-18, 2009, Spa, Belgium. Spa, Belgium: Université de Liège, 2009. p. 148-.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Directional repetitive control of a metrological AFM

AU - Ronde, M.J.C.

AU - Merry, R.J.E.

AU - Molengraft, van de, M.J.G.

AU - Steinbuch, M.

AU - Koops, K.R.

AU - Veghel, van, M.G.A.

PY - 2009

Y1 - 2009

N2 - abstract only

AB - abstract only

M3 - Conference contribution

SP - 148-

BT - Proceedings of the 28th Benelux Meeting on Systems and Control, March 16-18, 2009, Spa, Belgium

PB - Université de Liège

CY - Spa, Belgium

ER -