Directional repetitive control of a metrological AFM

M.J.C. Ronde, R.J.E. Merry, M.J.G. Molengraft, van de, M. Steinbuch, K.R. Koops, M.G.A. Veghel, van

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Abstract

abstract only
Original languageEnglish
Title of host publicationProceedings of the 28th Benelux Meeting on Systems and Control, March 16-18, 2009, Spa, Belgium
Place of PublicationSpa, Belgium
PublisherUniversité de Liège
Pages148-
Publication statusPublished - 2009

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