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Diffusion suppression in silicon by substitutional C doping
N. E.B. Cowern, B. Colombeau, F. Roozeboom, M. Hopstaken, H. Snijders, P. Meunier-Beillard, W. Lerch
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
6
Citations
(Scopus)