Diamond, graphite, and amorphous carbon deposition

J.J. Beulens, A.J.M. Buuron, D.K. Otorbaev, M.C.M. Sanden, van de, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Original languageEnglish
Title of host publicationComptes rendus des travaux du 8e colloque international sur les procedes plasma, 10-14 juin, 1991, Antibes, Juan-les-Pins, France
Place of PublicationParis
PublisherSociété Française du Vide
Pages329-331
Publication statusPublished - 1991

Publication series

NameLe Vide, les couches minces
Numbersuppl. 256
ISSN (Print)0223-4335

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