Diagnostics on the cascaded arc generated downstream plasma

M.C.M. Sanden, van de, G.J.H. Brussaard, W.M.M. Kessels, A. Graaf, de, M.F.A.M. Hest, van, K.G.Y. Letourneur, D.C. Schram

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Abstract

In this paper we will review four plasma diagnostics which have over the years lead to a better understanding of the plasma chemistry that occurs in the downstream plasma generated by a cascaded arc. The diagnostics reviewed comprise Thomson-Rayleigh scattering, Langmuir probe, ion mass spectrometry, residual gas analysis and infrared gas phase absorption. From these diagnostics important source properties as ion fluence, electron density and temperature downstream, the presence of large cluster ions, consumption of the injected precursor gas and the generation of new stable gases under processing conditions is obtained.
Original languageEnglish
Title of host publicationFrontiers in Low Temperature Plasma Diagnostics III : Book of Papers
Place of PublicationLausanne
PublisherEcole Polytechnique Fédérale de Lausanne
Pages73-82
Publication statusPublished - 1999
EventFrontiers in Low Temperature Plasma Diagnostics III, February 15-19, 1999, Saillon, Switzerland - Saillon, Switzerland
Duration: 15 Feb 199919 Feb 1999

Publication series

NameLRP / Ecole Polytechnique Fédérale de Lausanne
Volume629/99

Workshop

WorkshopFrontiers in Low Temperature Plasma Diagnostics III, February 15-19, 1999, Saillon, Switzerland
Country/TerritorySwitzerland
CitySaillon
Period15/02/9919/02/99

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