Diagnostics of deposition plasmas

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Original language	English
Pages (from-to)	217-230
Journal	Journal de Physique IV, Colloque
Volume	8
Issue number	PR7
Publication status	Published - 1998

Cite this

@article{d199d4038d0e4db6a1214191244a7bf3,

title = "Diagnostics of deposition plasmas",

author = "D.C. Schram and {Sanden, van de}, M.C.M. and R.J. Severens and W.M.M. Kessels",

year = "1998",

language = "English",

volume = "8",

pages = "217--230",

journal = "Journal de Physique IV, Colloque",

issn = "1155-4339",

publisher = "EDP Sciences",

number = "PR7",

}