Diagnostics needs for understanding plasma assisted deposition

D.C. Schram; M.G.H. Boogaarts; G.J. Brinkman; H.F. Döbele; J.W.A.M. Gielen; W.M.M. Kessels; S. Mazouffre; J.J.A.M. Mullen, van der; M.C.M. Sanden, van de; R.J. Severens

Diagnostics needs for understanding plasma assisted deposition

D.C. Schram
, M.G.H. Boogaarts
, G.J. Brinkman
, H.F. Döbele
, J.W.A.M. Gielen
, W.M.M. Kessels
, S. Mazouffre
, J.J.A.M. Mullen, van der
, M.C.M. Sanden, van de
, R.J. Severens

Plasma & Materials Processing

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

106 Downloads (Pure)

Original language	English
Title of host publication	Frontiers in Low Temperature Plasma Diagnostics II : papers
Place of Publication	Bad Honnef, Germany
Publisher	Arbeitsgemeinschaft Plasmaphysik
Pages	65-76
Publication status	Published - 1997
Event	conference; Frontiers in Low Temperature Plamsa Diagnostics II, Bad Honnef, Duitsland, 17-21 februari 1997; 1997-02-17; 1997-02-21 - Duration: 17 Feb 1997 → 21 Feb 1997

Conference

Conference	conference; Frontiers in Low Temperature Plamsa Diagnostics II, Bad Honnef, Duitsland, 17-21 februari 1997; 1997-02-17; 1997-02-21
Period	17/02/97 → 21/02/97
Other	Frontiers in Low Temperature Plamsa Diagnostics II, Bad Honnef, Duitsland, 17-21 februari 1997

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592510Final published version, 713 KB

Cite this

Schram, D. C., Boogaarts, M. G. H., Brinkman, G. J., Döbele, H. F., Gielen, J. W. A. M., Kessels, W. M. M., Mazouffre, S., Mullen, van der, J. J. A. M., Sanden, van de, M. C. M., & Severens, R. J. (1997). Diagnostics needs for understanding plasma assisted deposition. In Frontiers in Low Temperature Plasma Diagnostics II : papers (pp. 65-76). Arbeitsgemeinschaft Plasmaphysik.

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title = "Diagnostics needs for understanding plasma assisted deposition",

author = "D.C. Schram and M.G.H. Boogaarts and G.J. Brinkman and H.F. D{\"o}bele and J.W.A.M. Gielen and W.M.M. Kessels and S. Mazouffre and \{Mullen, van der\}, J.J.A.M. and \{Sanden, van de\}, M.C.M. and R.J. Severens",

year = "1997",

language = "English",

pages = "65--76",

booktitle = "Frontiers in Low Temperature Plasma Diagnostics II : papers",

publisher = "Arbeitsgemeinschaft Plasmaphysik",

note = "conference; Frontiers in Low Temperature Plamsa Diagnostics II, Bad Honnef, Duitsland, 17-21 februari 1997; 1997-02-17; 1997-02-21 ; Conference date: 17-02-1997 Through 21-02-1997",

}

Schram, DC, Boogaarts, MGH, Brinkman, GJ, Döbele, HF, Gielen, JWAM, Kessels, WMM, Mazouffre, S, Mullen, van der, JJAM, Sanden, van de, MCM & Severens, RJ 1997, Diagnostics needs for understanding plasma assisted deposition. in Frontiers in Low Temperature Plasma Diagnostics II : papers. Arbeitsgemeinschaft Plasmaphysik, Bad Honnef, Germany, pp. 65-76, conference; Frontiers in Low Temperature Plamsa Diagnostics II, Bad Honnef, Duitsland, 17-21 februari 1997; 1997-02-17; 1997-02-21, 17/02/97.

TY - GEN

T1 - Diagnostics needs for understanding plasma assisted deposition

AU - Schram, D.C.

AU - Boogaarts, M.G.H.

AU - Brinkman, G.J.

AU - Döbele, H.F.

AU - Gielen, J.W.A.M.

AU - Kessels, W.M.M.

AU - Mazouffre, S.

AU - Mullen, van der, J.J.A.M.

AU - Sanden, van de, M.C.M.

AU - Severens, R.J.

PY - 1997

Y1 - 1997

M3 - Conference contribution

SP - 65

EP - 76

BT - Frontiers in Low Temperature Plasma Diagnostics II : papers

PB - Arbeitsgemeinschaft Plasmaphysik

CY - Bad Honnef, Germany

T2 - conference; Frontiers in Low Temperature Plamsa Diagnostics II, Bad Honnef, Duitsland, 17-21 februari 1997; 1997-02-17; 1997-02-21

Y2 - 17 February 1997 through 21 February 1997

ER -