Diagnostics needs for understanding plasma assisted deposition

D.C. Schram, M.G.H. Boogaarts, G.J. Brinkman, H.F. Döbele, J.W.A.M. Gielen, W.M.M. Kessels, S. Mazouffre, J.J.A.M. Mullen, van der, M.C.M. Sanden, van de, R.J. Severens

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Original languageEnglish
Title of host publicationFrontiers in Low Temperature Plasma Diagnostics II : papers
Place of PublicationBad Honnef, Germany
PublisherArbeitsgemeinschaft Plasmaphysik
Pages65-76
Publication statusPublished - 1997
Eventconference; Frontiers in Low Temperature Plamsa Diagnostics II, Bad Honnef, Duitsland, 17-21 februari 1997; 1997-02-17; 1997-02-21 -
Duration: 17 Feb 199721 Feb 1997

Conference

Conferenceconference; Frontiers in Low Temperature Plamsa Diagnostics II, Bad Honnef, Duitsland, 17-21 februari 1997; 1997-02-17; 1997-02-21
Period17/02/9721/02/97
OtherFrontiers in Low Temperature Plamsa Diagnostics II, Bad Honnef, Duitsland, 17-21 februari 1997

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