Abstract
In this work, we report on our last results concerning the polyethyleneterephtalate barrier performance optimization as a function of the chemistry of the SiOx coating, deposited by means of hexamethyldisiloxane/oxygen-fed plasmas ignited in an RF capacitively coupled parallel plates reactor. The influence of the gas feed composition and power on the plasma phase/coating chemistry and on the O2 gas transmission rate has been investigated. The plasma phase has been studied by means of Fourier transform infrared absorption (FT-IR) and optical emission spectroscopies (OES), and the results have been coupled to the film chemistry investigated by means of FT-IR spectroscopy. These techniques show excellent potentialities in the correlation of the plasma phase and film chemistries with the barrier properties of the SiOx-coated polymer, especially when a very good barrier level is required.
| Original language | English |
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| Pages (from-to) | 407-411 |
| Journal | Pure and Applied Chemistry |
| Volume | 74 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2002 |