Device for creating a local cold plasma at the location of an object

E. Stoffels - Adamowicz (Inventor), M. Franken (Inventor), M. Steinbuch (Inventor), E.P. Laan, van der (Inventor)

Research output: PatentPatent publication

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Abstract

The invention relates to a device for creating a local cold plasma at the location of an object, said device at least comprising a high-frequency power source, a plasma chamber, a plasma discharge electrode disposed in said plasma chamber, which is electrically connected to said high-frequency power source, as well as a supply line for a plasma gas, which opens into the plasma chamber at a location near the plasma discharge electrode. The object of the invention is to provide an improved device as referred to in the introduction, which enables an improved control of the created plasma in relation to the object. To that end, the device according to the invention is characterized in that the device comprises adjusting means arranged for automatically orienting the plasma discharge electrode relative to the object.
Original languageEnglish
Patent numberWO2005125287
Publication statusPublished - 29 Dec 2005

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