Device and method for generating a plasma discharge for patterning the surface of a substrate

P.M. Blom (Inventor), A.A.E. Stevens (Inventor), Laura Huijbregts (Inventor), H.A.M. De Haan (Inventor), A.H. Van Schijndel (Inventor), E Te Sligte (Inventor), C.J. Van Hijningen (Inventor), T. Huiskamp (Inventor)

Research output: PatentPatent publication

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Physics & Astronomy