Developments in low-energy ion scattering from surfaces

H. H. Brongersma; R. H. Bergmans; L. G.C. Buijs; J. P. Jacobs; A. C. Kruseman; C. A. Severijns; R. G. van Welzenis

doi:10.1016/0168-583X(92)96077-C

Developments in low-energy ion scattering from surfaces

H. H. Brongersma, R. H. Bergmans, L. G.C. Buijs, J. P. Jacobs, A. C. Kruseman, C. A. Severijns, R. G. van Welzenis

Applied Physics and Science Education

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Abstract

Low-energy (0.1-10 keV) ion scattering (LEIS) can be used to analyze the atomic composition of the outermost layer of a surface. Possibilities for quantification and in-depth information are discussed. Using a new type of energy analyzer (EARISS) which enables the simultaneous detection of a large part of the energy spectrum, a greatly improved sensitivity is obtained. Even for a catalyst consisting of a highly dispersed carbon support (1000 m²/g) and a low loading of Pd/Pt clusters, the surface composition can be determined using a 2 keV Ne⁺ ion beam current of only 30 pA.

Original language	English
Pages (from-to)	207-212
Number of pages	6
Journal	Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume	68
Issue number	1-4
DOIs	https://doi.org/10.1016/0168-583X(92)96077-C
Publication status	Published - 2 May 1992

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T1 - Developments in low-energy ion scattering from surfaces

AU - Brongersma, H. H.

AU - Bergmans, R. H.

AU - Buijs, L. G.C.

AU - Jacobs, J. P.

AU - Kruseman, A. C.

AU - Severijns, C. A.

AU - van Welzenis, R. G.

PY - 1992/5/2

Y1 - 1992/5/2

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AB - Low-energy (0.1-10 keV) ion scattering (LEIS) can be used to analyze the atomic composition of the outermost layer of a surface. Possibilities for quantification and in-depth information are discussed. Using a new type of energy analyzer (EARISS) which enables the simultaneous detection of a large part of the energy spectrum, a greatly improved sensitivity is obtained. Even for a catalyst consisting of a highly dispersed carbon support (1000 m2/g) and a low loading of Pd/Pt clusters, the surface composition can be determined using a 2 keV Ne+ ion beam current of only 30 pA.

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IS - 1-4

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Developments in low-energy ion scattering from surfaces

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