Development of highly permeable ultra-thin Pd-bases supported membranes

E. Fernandez, J.A. Sanchez-Garcia, Jon Melendez Rey, V. Spallina, M. van Sint Annaland, F. Gallucci, D.A. Pacheco Tanaka, R. Prema

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This paper reports the preparation and characterization of ultra-thin (∼1 μm thick) Pd-based supported membranes for hydrogen purification. Ultra-thin membranes have been prepared by a combination of PVD magnetron sputtering and electroless plating techniques. The membranes have been characterized for single gas and mix gas permeation at temperatures between 350 and 500 °C and they have shown to exhibit very high hydrogen fluxes combined with a good perm-selectivity (H2/N2 ≈ 500). These results have been compared with the performance of highly permeable membranes reported in the literature. The influence of the morphology of the deposited Pd-based layers on the membrane performance has been investigated and discussed.
Original languageEnglish
Pages (from-to)149-155
Number of pages7
JournalChemical Engineering Journal
Early online date23 Nov 2015
Publication statusPublished - 24 Oct 2016


  • Palladium membrane preparation
  • PVD magnetron sputtering
  • ELP
  • H2 separation
  • Ultra-thin layer


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