Development of a new differential confocal optical probe with nanometer accuracy at large acceptance angles for measurement of free-form aspherics

L.A. Cacace, W.D. Amstel, van, R. Henselmans, H. Man, de, P.C.J.N. Rosielle

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
Original languageEnglish
Title of host publicationProceedings of the 7th Euspen international meeting 2007, May 20-24, Germany, Bremen
EditorsE. Thornett
Publication statusPublished - 2007

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