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Development of a measuring laser system with nanometer accuracy

  • S.F.C.L. Wetzels
  • , P.H.J. Schellekens

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    Original languageEnglish
    Title of host publicationProceedings of the 9th annual meeting of the American Society of Precison Engineering : October 2-7, 1994, Cincinnati, Ohio
    Place of PublicationRaleigh
    PublisherAmerican Society of Precision Engineering (ASPE)
    ISBN (Print)1-88770-612-7
    Publication statusPublished - 1994

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