To decrease inspection times of workpieces, not only do coordinate measuring machines (CMMs) need to operate faster, but also the mechanical probing process requires attention in this field. This paper shows that impact forces attributable to probing are much higher than generally accepted measurement forces, which can result in workpiece damage. Furthermore, it is shown that probe tip bouncing can slow down the probing process and requires mechanical damping to reduce it. Based upon these findings, a fast mechanical probe system has been developed, equipped with an optical measurement system able to measure six degrees of freedom at high speed. The probe system is suitable for high-speed, single-point measurements as well as scanning purposes. The measurement uncertainty of the prototype is approximately 1 µm for probing speeds up to 70 mm/s.