Development of a 2D probing system with nanometer resolution

W.O. Pril; K.G. Struik; P.H.J. Schellekens

Development of a 2D probing system with nanometer resolution

W.O. Pril
, K.G. Struik
, P.H.J. Schellekens

Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

9 Downloads (Pure)

Original language	English
Title of host publication	Proceedings of the 12th annual meeting of the American Society of Precision Engineering : October 5-10, 1997, Norfolk, Virginia
Place of Publication	Raleigh
Publisher	American Society of Precision Engineering (ASPE)
Pages	438-442
ISBN (Print)	1-88770-618-6
Publication status	Published - 1997
Event	12th Annual Meeting of the American Society for Precision Engineering (ASPE 1997) - Norfolk Marriott Waterside Hotel and Waterside Convention Center, Norfolk, United States Duration: 5 Oct 1997 → 10 Oct 1997 Conference number: 12

Conference

Conference	12th Annual Meeting of the American Society for Precision Engineering (ASPE 1997)
Abbreviated title	ASPE 1997
Country/Territory	United States
City	Norfolk
Period	5/10/97 → 10/10/97

Cite this

@inproceedings{01f2446f0f8b4d7fbd3bd2c05bef4e37,

title = "Development of a 2D probing system with nanometer resolution",

author = "W.O. Pril and K.G. Struik and P.H.J. Schellekens",

year = "1997",

language = "English",

isbn = "1-88770-618-6",

pages = "438--442",

booktitle = "Proceedings of the 12th annual meeting of the American Society of Precision Engineering : October 5-10, 1997, Norfolk, Virginia",

publisher = "American Society of Precision Engineering (ASPE)",

note = "12th Annual Meeting of the American Society for Precision Engineering (ASPE 1997), ASPE 1997 ; Conference date: 05-10-1997 Through 10-10-1997",

}

Pril, WO, Struik, KG & Schellekens, PHJ 1997, Development of a 2D probing system with nanometer resolution. in Proceedings of the 12th annual meeting of the American Society of Precision Engineering : October 5-10, 1997, Norfolk, Virginia. American Society of Precision Engineering (ASPE), Raleigh, pp. 438-442, 12th Annual Meeting of the American Society for Precision Engineering (ASPE 1997), Norfolk, Virginia, United States, 5/10/97.

Development of a 2D probing system with nanometer resolution. / Pril, W.O.; Struik, K.G.; Schellekens, P.H.J.
Proceedings of the 12th annual meeting of the American Society of Precision Engineering : October 5-10, 1997, Norfolk, Virginia. Raleigh: American Society of Precision Engineering (ASPE), 1997. p. 438-442.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Development of a 2D probing system with nanometer resolution

AU - Pril, W.O.

AU - Struik, K.G.

AU - Schellekens, P.H.J.

N1 - Conference code: 12

PY - 1997

Y1 - 1997

M3 - Conference contribution

SN - 1-88770-618-6

SP - 438

EP - 442

BT - Proceedings of the 12th annual meeting of the American Society of Precision Engineering : October 5-10, 1997, Norfolk, Virginia

PB - American Society of Precision Engineering (ASPE)

CY - Raleigh

T2 - 12th Annual Meeting of the American Society for Precision Engineering (ASPE 1997)

Y2 - 5 October 1997 through 10 October 1997

ER -