Development of a 2D probing system with nanometer resolution

W.O. Pril, K.G. Struik, P.H.J. Schellekens

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Original languageEnglish
Title of host publicationProceedings of the 12th annual meeting of the American Society of Precision Engineering : October 5-10, 1997, Norfolk, Virginia
Place of PublicationRaleigh
PublisherAmerican Society of Precision Engineering (ASPE)
Pages438-442
ISBN (Print)1-88770-618-6
Publication statusPublished - 1997
Event12th Annual Meeting of the American Society for Precision Engineering (ASPE 1997) - Norfolk Marriott Waterside Hotel and Waterside Convention Center, Norfolk, United States
Duration: 5 Oct 199710 Oct 1997
Conference number: 12

Conference

Conference12th Annual Meeting of the American Society for Precision Engineering (ASPE 1997)
Abbreviated titleASPE 1997
Country/TerritoryUnited States
CityNorfolk
Period5/10/9710/10/97

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