Development and performance demonstration of the NANOMEFOS non-contact measurement machine for freeform optics

R. Henselmans, L.A. Cacace, G.F.IJ. Kramer, P.C.J.N. Rosielle, M. Steinbuch

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
65 Downloads (Pure)

Abstract

This paper shows the machine concept, the realization and the test results of the completed NANOMEFOS non-contact measurement machine for freeform optics. The separate short metrology loop results in a stability at standstill of 0.9 nm rms over 0.1 s. Measurements of a tilted flat show a repeatability of 2-4 nm rms, depending on the applied tilt, and a flatness that agrees well with the NMi measurement.
Original languageEnglish
Title of host publicationProceedings of the 9th Euspen International Conference and 11th Annual General Meeting, 2-5 June 2009, San Sebastian, Spain
Place of PublicationSpain, San Sebastian
Pages164-168
Publication statusPublished - 2009

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  • Nanomefos

    P.C.J.N. (Nick) Rosielle (Manager)

    Mechanical Engineering

    Facility/equipment: Equipment

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