This paper shows the machine concept, the realization and the test results of the completed NANOMEFOS non-contact measurement machine for freeform optics. The separate short metrology loop results in a stability at standstill of 0.9 nm rms over 0.1 s. Measurements of a tilted flat show a repeatability of 2-4 nm rms, depending on the applied tilt, and a flatness that agrees well with the NMi measurement.
|Title of host publication||Proceedings of the 9th Euspen International Conference and 11th Annual General Meeting, 2-5 June 2009, San Sebastian, Spain|
|Place of Publication||Spain, San Sebastian|
|Publication status||Published - 2009|