Abstract
Quantitative analysis in low-energy ion scattering (LEIS) requires an understanding of the charge-exchange processes to estimate the elemental sensitivity factors. In this work, the neutralization of He+ scattered by 18O-exchanged silica at energies between 0.6 and 7¿keV was studied. The process is dominated by Auger neutralization for Ei¿¿2¿keV. The ion fractions P+ were determined for Si and O using the characteristic velocity method to quantify the surface density. The 18O/16O sensitivity ratio indicates an 18% higher sensitivity for the heavier O isotope.
Original language | English |
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Article number | 151602 |
Pages (from-to) | 151602-1/4 |
Number of pages | 4 |
Journal | Applied Physics Letters |
Volume | 101 |
Issue number | 15 |
DOIs | |
Publication status | Published - 2012 |
Externally published | Yes |