Determination of 16O and 18O sensitivity factors and charge-exchange processes in low-energy ion scattering

H. Téllez; R.J. Chater; S. Fearn; E. Symianakis; H.H. Brongersma; J.A. Kilner

doi:10.1063/1.4758699

Determination of 16O and 18O sensitivity factors and charge-exchange processes in low-energy ion scattering

H. Téllez, R.J. Chater, S. Fearn, E. Symianakis, H.H. Brongersma, J.A. Kilner

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Abstract

Quantitative analysis in low-energy ion scattering (LEIS) requires an understanding of the charge-exchange processes to estimate the elemental sensitivity factors. In this work, the neutralization of He+ scattered by 18O-exchanged silica at energies between 0.6 and 7¿keV was studied. The process is dominated by Auger neutralization for Ei¿¿2¿keV. The ion fractions P+ were determined for Si and O using the characteristic velocity method to quantify the surface density. The 18O/16O sensitivity ratio indicates an 18% higher sensitivity for the heavier O isotope.

Original language	English
Article number	151602
Pages (from-to)	151602-1/4
Number of pages	4
Journal	Applied Physics Letters
Volume	101
Issue number	15
DOIs	https://doi.org/10.1063/1.4758699
Publication status	Published - 2012
Externally published	Yes

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title = "Determination of 16O and 18O sensitivity factors and charge-exchange processes in low-energy ion scattering",

abstract = "Quantitative analysis in low-energy ion scattering (LEIS) requires an understanding of the charge-exchange processes to estimate the elemental sensitivity factors. In this work, the neutralization of He+ scattered by 18O-exchanged silica at energies between 0.6 and 7¿keV was studied. The process is dominated by Auger neutralization for Ei¿¿2¿keV. The ion fractions P+ were determined for Si and O using the characteristic velocity method to quantify the surface density. The 18O/16O sensitivity ratio indicates an 18% higher sensitivity for the heavier O isotope.",

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T1 - Determination of 16O and 18O sensitivity factors and charge-exchange processes in low-energy ion scattering

AU - Téllez, H.

AU - Chater, R.J.

AU - Fearn, S.

AU - Symianakis, E.

AU - Brongersma, H.H.

AU - Kilner, J.A.

PY - 2012

Y1 - 2012

N2 - Quantitative analysis in low-energy ion scattering (LEIS) requires an understanding of the charge-exchange processes to estimate the elemental sensitivity factors. In this work, the neutralization of He+ scattered by 18O-exchanged silica at energies between 0.6 and 7¿keV was studied. The process is dominated by Auger neutralization for Ei¿¿2¿keV. The ion fractions P+ were determined for Si and O using the characteristic velocity method to quantify the surface density. The 18O/16O sensitivity ratio indicates an 18% higher sensitivity for the heavier O isotope.

AB - Quantitative analysis in low-energy ion scattering (LEIS) requires an understanding of the charge-exchange processes to estimate the elemental sensitivity factors. In this work, the neutralization of He+ scattered by 18O-exchanged silica at energies between 0.6 and 7¿keV was studied. The process is dominated by Auger neutralization for Ei¿¿2¿keV. The ion fractions P+ were determined for Si and O using the characteristic velocity method to quantify the surface density. The 18O/16O sensitivity ratio indicates an 18% higher sensitivity for the heavier O isotope.

U2 - 10.1063/1.4758699

DO - 10.1063/1.4758699

M3 - Article

SN - 0003-6951

VL - 101

SP - 151602-1/4

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 15

M1 - 151602

ER -

Determination of 16O and 18O sensitivity factors and charge-exchange processes in low-energy ion scattering

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