Determination of 16O and 18O sensitivity factors and charge-exchange processes in low-energy ion scattering

H. Téllez, R.J. Chater, S. Fearn, E. Symianakis, H.H. Brongersma, J.A. Kilner

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Abstract

Quantitative analysis in low-energy ion scattering (LEIS) requires an understanding of the charge-exchange processes to estimate the elemental sensitivity factors. In this work, the neutralization of He+ scattered by 18O-exchanged silica at energies between 0.6 and 7¿keV was studied. The process is dominated by Auger neutralization for Ei¿¿2¿keV. The ion fractions P+ were determined for Si and O using the characteristic velocity method to quantify the surface density. The 18O/16O sensitivity ratio indicates an 18% higher sensitivity for the heavier O isotope.
Original languageEnglish
Article number151602
Pages (from-to)151602-1/4
Number of pages4
JournalApplied Physics Letters
Volume101
Issue number15
DOIs
Publication statusPublished - 2012
Externally publishedYes

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