Detection of particulates in a rf plasma by laser evaporation and subsequent discharge formation

W.W. Stoffels; E. Stoffels; G.M.W. Kroesen; F.J. Hoog, de

doi:10.1063/1.354603

Detection of particulates in a rf plasma by laser evaporation and subsequent discharge formation

W.W. Stoffels, E. Stoffels, G.M.W. Kroesen, F.J. Hoog, de

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Abstract

Nd:YAG-laser-induced evaporation of particulates formed in an Ar-CCl 2F2 rf plasma and the subsequent discharge in the vapor have been investigated in situ by means of optical emission spectroscopy. The estimated threshold for discharge formation is 5×106 W/cm 2. The maximum laser-induced emission intensity is observed when the laser is operated in the long-pulse mode (about 200 µs pulse duration) at the fundamental frequency. The wavelength integrated intensity of this continuum emission has been compared with light scattering intensity at the same laser energy. It has been found that the laser-induced emission intensity can be more than ten times higher than the scattering intensity, especially for particulates with a diameter much smaller than the wavelength of the laser. Therefore, this effect provides a sensitive particulate detection method.

Original language	English
Pages (from-to)	2959-2961
Journal	Journal of Applied Physics
Volume	74
Issue number	4
DOIs	https://doi.org/10.1063/1.354603
Publication status	Published - 1993

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title = "Detection of particulates in a rf plasma by laser evaporation and subsequent discharge formation",

abstract = "Nd:YAG-laser-induced evaporation of particulates formed in an Ar-CCl 2F2 rf plasma and the subsequent discharge in the vapor have been investigated in situ by means of optical emission spectroscopy. The estimated threshold for discharge formation is 5×106 W/cm 2. The maximum laser-induced emission intensity is observed when the laser is operated in the long-pulse mode (about 200 µs pulse duration) at the fundamental frequency. The wavelength integrated intensity of this continuum emission has been compared with light scattering intensity at the same laser energy. It has been found that the laser-induced emission intensity can be more than ten times higher than the scattering intensity, especially for particulates with a diameter much smaller than the wavelength of the laser. Therefore, this effect provides a sensitive particulate detection method.",

author = "W.W. Stoffels and E. Stoffels and G.M.W. Kroesen and {Hoog, de}, F.J.",

year = "1993",

doi = "10.1063/1.354603",

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volume = "74",

pages = "2959--2961",

journal = "Journal of Applied Physics",

issn = "0021-8979",

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T1 - Detection of particulates in a rf plasma by laser evaporation and subsequent discharge formation

AU - Stoffels, W.W.

AU - Stoffels, E.

AU - Kroesen, G.M.W.

AU - Hoog, de, F.J.

PY - 1993

Y1 - 1993

N2 - Nd:YAG-laser-induced evaporation of particulates formed in an Ar-CCl 2F2 rf plasma and the subsequent discharge in the vapor have been investigated in situ by means of optical emission spectroscopy. The estimated threshold for discharge formation is 5×106 W/cm 2. The maximum laser-induced emission intensity is observed when the laser is operated in the long-pulse mode (about 200 µs pulse duration) at the fundamental frequency. The wavelength integrated intensity of this continuum emission has been compared with light scattering intensity at the same laser energy. It has been found that the laser-induced emission intensity can be more than ten times higher than the scattering intensity, especially for particulates with a diameter much smaller than the wavelength of the laser. Therefore, this effect provides a sensitive particulate detection method.

AB - Nd:YAG-laser-induced evaporation of particulates formed in an Ar-CCl 2F2 rf plasma and the subsequent discharge in the vapor have been investigated in situ by means of optical emission spectroscopy. The estimated threshold for discharge formation is 5×106 W/cm 2. The maximum laser-induced emission intensity is observed when the laser is operated in the long-pulse mode (about 200 µs pulse duration) at the fundamental frequency. The wavelength integrated intensity of this continuum emission has been compared with light scattering intensity at the same laser energy. It has been found that the laser-induced emission intensity can be more than ten times higher than the scattering intensity, especially for particulates with a diameter much smaller than the wavelength of the laser. Therefore, this effect provides a sensitive particulate detection method.

U2 - 10.1063/1.354603

DO - 10.1063/1.354603

M3 - Article

SN - 0021-8979

VL - 74

SP - 2959

EP - 2961

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 4

ER -

Detection of particulates in a rf plasma by laser evaporation and subsequent discharge formation

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