Detection of particulates in a rf plasma by laser evaporation and subsequent discharge formation

W.W. Stoffels, E. Stoffels, G.M.W. Kroesen, F.J. Hoog, de

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Abstract

Nd:YAG-laser-induced evaporation of particulates formed in an Ar-CCl 2F2 rf plasma and the subsequent discharge in the vapor have been investigated in situ by means of optical emission spectroscopy. The estimated threshold for discharge formation is 5×106 W/cm 2. The maximum laser-induced emission intensity is observed when the laser is operated in the long-pulse mode (about 200 µs pulse duration) at the fundamental frequency. The wavelength integrated intensity of this continuum emission has been compared with light scattering intensity at the same laser energy. It has been found that the laser-induced emission intensity can be more than ten times higher than the scattering intensity, especially for particulates with a diameter much smaller than the wavelength of the laser. Therefore, this effect provides a sensitive particulate detection method.
Original languageEnglish
Pages (from-to)2959-2961
JournalJournal of Applied Physics
Volume74
Issue number4
DOIs
Publication statusPublished - 1993

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