Detection and measurement of contamination in reticles using computer vision

Juan Ortiz Sevillano

Research output: Thesis › EngD Thesis

Original language	English
Supervisors/Advisors	van Eijndhoven, Stef J.L., Supervisor
Award date	15 Jan 2020
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Publication status	Published - 20 Jan 2020

PDEng thesis. - Confidential for ever.

Cite this

@phdthesis{5b92a1590ad44826b11c4d45ca4deb2a,

title = "Detection and measurement of contamination in reticles using computer vision",

author = "{Ortiz Sevillano}, Juan",

note = "PDEng thesis. - Confidential for ever.",

year = "2020",

month = jan,

day = "20",

language = "English",

series = "PDEng report",

publisher = "Technische Universiteit Eindhoven",

type = "EngD Thesis",

}