Detailed investigation of the plasma chemistry in Ar/C2H2 : expanding thermal plasma and its influence on the film properties

J. Benedikt, R.V. Woen, Siebe van Mensfoort, V. Perina, M.C.M. Sanden, van de

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProceedings of the XIVth symposium on Application of Plasma Processes, SAPP XIV : January 13-18, 2003, Liptovský Mikuláš, Slovak Republic
Pages19-20
Number of pages2
Publication statusPublished - 2003
Event14th Symposium on Application of Plasma Processes (SAP 2003) - Hotel Jamajka, Liptovský Mikuláš, Slovakia
Duration: 13 Jan 200318 Jan 2003

Conference

Conference14th Symposium on Application of Plasma Processes (SAP 2003)
Abbreviated titleSAP XIV
CountrySlovakia
City Liptovský Mikuláš
Period13/01/0318/01/03

Cite this

Benedikt, J., Woen, R. V., van Mensfoort, S., Perina, V., & Sanden, van de, M. C. M. (2003). Detailed investigation of the plasma chemistry in Ar/C2H2 : expanding thermal plasma and its influence on the film properties. In Proceedings of the XIVth symposium on Application of Plasma Processes, SAPP XIV : January 13-18, 2003, Liptovský Mikuláš, Slovak Republic (pp. 19-20)