Design of single wafer chemical vapour deposition reactors for the deposition of molybdenum layers on patterned silicon substrates

H.J.C.M. Terhorst, Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Proces- en Produktontwerp

    Research output: ThesisPd Eng Thesis

    Original languageEnglish
    QualificationDoctor of Philosophy
    Awarding Institution
    Supervisors/Advisors
    • Marin, G.B.M.M., Supervisor
    • de Croon, Mart, Supervisor
    Award date1 Jan 1995
    Place of PublicationEindhoven
    Publisher
    Print ISBNs90-5282-591-2
    Publication statusPublished - 1995

    Bibliographical note

    Eindverslag.

    Cite this

    Terhorst, H. J. C. M., & Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Proces- en Produktontwerp (1995). Design of single wafer chemical vapour deposition reactors for the deposition of molybdenum layers on patterned silicon substrates. Eindhoven University of Technology.