Design of single wafer chemical vapour deposition reactors for the deposition of molybdenum layers on patterned silicon substrates

H.J.C.M. Terhorst, Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Proces- en Produktontwerp

    Research output: ThesisEngD Thesis

    Original languageEnglish
    QualificationDoctor of Philosophy
    Awarding Institution
    • Marin, G.B.M.M., Supervisor
    • de Croon, Mart, Supervisor
    Award date1 Jan 1995
    Place of PublicationEindhoven
    Print ISBNs90-5282-591-2
    Publication statusPublished - 1995

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