Design of an active wafer clamp for wafer machines

M.M.A. Steur

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Mechanical Engineering
Supervisors/Advisors	Steinbuch, Maarten, Promotor Rosielle, P.C.J.N., Copromotor
Award date	8 Nov 2017
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	978-90-386-4360-1
Publication status	Published - 8 Nov 2017

Proefschrift

Promotion : time and place

@phdthesis{5564bb4341f9408582fa543131980fcf,

title = "Design of an active wafer clamp for wafer machines",

author = "M.M.A. Steur",

note = "Proefschrift",

year = "2017",

month = nov,

day = "8",

language = "English",

isbn = "978-90-386-4360-1",

publisher = "Technische Universiteit Eindhoven",

school = "Mechanical Engineering",

}