Design of an active wafer clamp for wafer machines

M.M.A. Steur

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

1402 Downloads (Pure)
Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Mechanical Engineering
Supervisors/Advisors
  • Steinbuch, Maarten, Promotor
  • Rosielle, P.C.J.N., Copromotor
Award date8 Nov 2017
Place of PublicationEindhoven
Publisher
Print ISBNs978-90-386-4360-1
Publication statusPublished - 8 Nov 2017

Bibliographical note

Proefschrift

Promotion : time and place

  • 16:00h, Auditorium, Collegezaal 4

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