Design of a short stroke actuator for a wafer stepper

Research output: Thesis › EngD Thesis

Original language	English
Supervisors/Advisors	Kamerbeek, E.M.H., Supervisor Compter, John, External supervisor
Award date	1 Jan 1994
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven. Instituut Vervolgopleidingen
Print ISBNs	90-5282-407-X
Publication status	Published - 1994

Eindverslag

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